Edwards Introduces New Smart Thermal Management System Updated On Tue, Oct 25th, 2016 by Saurenergy Edwards at SEMICON Europa launched a new Thermal Management System. Smart Thermal Management System helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by reducing vacuum/abatement pipework condensation. The new Smart TMS adds feedback control to accurately maintain gas temperature in vacuum pump fore lines and exhaust lines. Unheated lines […] Read more
